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Fizika i Tekhnika Poluprovodnikov, 2010 Volume 44, Issue 11, Pages 1494–1497 (Mi phts8975)

XIV Annual International Workshop ''Nanophysics and Nanoelectronics 2010''

Control of emission wavelength for InGaAs/GaAs quantum wells and laser structures on their basis by means of proton irradiation

S. A. Akhlestina, V. K. Vasil'ev, O. V. Vikhrova, Yu. A. Danilov, B. N. Zvonkov, S. M. Nekorkin

Scientific-Research Physicotechnical Institute at the Nizhnii Novgorod State University, Nizhnii Novgorod

Abstract: Features of controlling the wavelength of emission from laser heterostructures with strained InGaAs/GaAs quantum wells by irradiation with medium-energy (with the energy as high as 150 keV) protons are studied. It is established that irradiation with H$^+$ ions and subsequent thermal annealing at a temperature of 700$^\circ$C make it possible to decrease the wavelength of emission from quantum wells. As the dose of ions is increased from 10$^{13}$ to 10$^{16}$ cm$^{-2}$, the magnitude of change in the wavelength increases to 20 nm. Starting with a dose of 10$^{15}$ cm$^{-2}$, a significant decrease in the intensity of emission is observed. The optimum dose of H$^+$ ions (6 $\times$ 10$^{14}$ cm$^{-2}$) and annealing temperature (700$^\circ$C) for modifying the InGaAs/GaAs/InGaP laser structures are determined; it is shown that, in this case, one can obtain a shift of $\sim$(8–10) nm for the wavelength of laser radiation with low losses in intensity with the quality of the surface of laser structures retained. The observed “blue” shift is caused by implantation-stimulated processes of intermixing of the In and Ga atoms at the InGaAs/GaAs interface.

Received: 08.04.2010
Accepted: 15.04.2010


 English version:
Semiconductors, 2010, 44:11, 1446–1449

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