Abstract:
Heterostructures with GaP/GaP$_{1-x}$N$_x$ and GaP/GaP$_{1-x-y}$As$_x$N$_y$ quantum wells grown by the MOCVD method are studied by methods of capacitance-voltage profiling and capacitive and current deep level transient spectroscopy. In heterostructures with GaP/GaP$_{1-x}$N$_x$ quantum wells, intrinsic defects with deep levels of 0.17 and 0.08 eV are revealed. It is shown that a considerable decrease in the concentration of these defects occurs with the substitution of a ternary GaP$_{1-x}$N$_x$ alloy forming the region of the quantum well by a GaP$_{1-x-y}$As$_x$N$_y$ quaternary alloy. The nature of emerging defects and mechanisms of decreasing their concentration are discussed.