O. V. Anisimov, V. I. Gaman, N. K. Maksimova, Yu. P. Najden, V. A. Novikov, E. Yu. Sevastyanov, F. V. Rudov, E. V. Chernikov, “Effect of gold on the properties of nitrogen dioxide sensors based on thin WO<nobr>$_3$</nobr> films”, Fizika i Tekhnika Poluprovodnikov, 2010, Volume 44, Issue 3,Pages <nobr>383

This article is cited in 20 papers

Semiconductor physics

Effect of gold on the properties of nitrogen dioxide sensors based on thin WO$_3$ films

O. V. Anisimov^a, V. I. Gaman^b, N. K. Maksimova^a, Yu. P. Najden^b, V. A. Novikov^b, E. Yu. Sevastyanov^a, F. V. Rudov^b, E. V. Chernikov^a

^a Siberian Physical-Technical Institute of the Tomsk State University
^b Tomsk State University

Abstract: The microstructure and properties of gold-doped WO$_3$ (WO$_3$:Au) thin films before and after deposition of dispersed Au layers have been studied. It is shown that the $\gamma$-WO$_{2.72}$ phase arises in WO$_3$:Au layers, which leads to a significant increase in the film conductivity. Deposition of a dispersed gold layer results in an increase in the sensor response to NO$_2$ by several times. The concentration dependences and the dynamics of sensor responses to nitrogen dioxide are described by the analytical expressions derived under the assumption that WO$_3$ films contain grains connected by conducting bridges. An analysis of the experimental data using these expressions made it possible to determine the activation energies of NO$_2$ adsorption and desorption and the adsorption heat.

Received: 28.05.2009
Accepted: 08.07.2009