This article is cited in 2 papers

Semiconductor structures, interfaces and surfaces

Reduction in absorption in quartz/Si, quartz/Si/SiO$_2$, and SiC/Si/SiO$_2$ structures on laser treatment

V. N. Lissotschenko^a, R. V. Konakova^a, B. G. Konoplev^b, V. V. Kushnir^b, O. B. Okhrimenko^c, A. M. Svetlichnyi<sup>b

a</sup> LIMO – Lissotchenko-Mikrooptik GmbH, 44319 Dortmund, Germany
^b Taganrog Technological Institute of Southern Federal University
^c Institute of Semiconductor Physics NAS, Kiev

Abstract: The effect of laser radiation on the optical absorption spectra of the quartz/Si, quartz/Si/SiO$_2$, and SiC/Si/SiO$_2$ systems is studied. The effects of modification of the transparency of the structures are clarified.

Received: 10.06.2009
Accepted: 23.06.2009

 English version: Semiconductors, 2010, 44:3, 309–312

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