Abstract:
It is established that annealing of ion-implanted thin Ge$_{0.96}$Mn$_{0.04}$ films with a thickness of 120 nm induces an increase in the microwave resistivity and a change in the mechanism of dephasing of charge carriers. The effect of annealing on the microwave transport properties of the thin films is due to the diffusion-controlled aggregation of dispersed Mn$^{2+}$ impurity ions to form Ge$_3$Mn$_5$ clusters.