This article is cited in 14 papers

Surface, interfaces, thin films

Modification of electrical and optical properties of ZnO films under ultraviolet irradiation

A. N. Gruzintsev, V. T. Volkov

Institute of Microelectronics Technology and High-Purity Materials RAS

Abstract: The effect of ultraviolet radiation of polycrystalline zinc oxide films (with a thickness of 200 nm) on their resistivity, transparency, and luminescence in the visible and violet spectral regions is studied. It is shown that, under irradiation of the films in air and vacuum, the conductivity, transmittance, and edge luminescence intensity increase with characteristic times of about 100 min. It is established that the corresponding processes controlled by desorption of oxygen atoms and molecules from the surface of nanocrytals in the ZnO films are reversible.

Received: 12.04.2011
Accepted: 18.04.2011

 English version: Semiconductors, 2011, 45:11, 1420–1424

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