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Fizika i Tekhnika Poluprovodnikov, 2011 Volume 45, Issue 9, Pages 1229–1234 (Mi phts8634)

This article is cited in 32 papers

Micro- and nanocrystalline, porous, composite semiconductors

XANES and IR spectroscopy study of the electronic structure and chemical composition of porous silicon on $n$- and $p$-type substrates

A. S. Len'shina, V. M. Kashkarova, P. V. Seredina, Yu. M. Spivakb, V. A. Moshnikovb

a Voronezh State University
b Saint Petersburg Electrotechnical University "LETI"

Abstract: The differences in the electronic structure and composition of porous silicon samples obtained under identical conditions of electrochemical etching on the most commonly used $n$- and $p$-type substrates with different conductivities are demonstrated by X-ray absorption near-edge spectroscopy (XANES) and Fourier transform IR spectroscopy (FTIR) methods. It is shown that significantly higher oxidation and saturation with hydrogen is observed for the porous layer on $n$-type substrates.

Received: 07.02.2011
Accepted: 16.02.2011


 English version:
Semiconductors, 2011, 45:9, 1183–1188

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