This article is cited in 14 papers

Manufacturing, processing, testing of materials and structures

Fabrication technology of heterojunctions in the lattice of a 2D photonic crystal based on macroporous silicon

Yu. A. Zharova^a, G. V. Fedulova^a, E. V. Astrova^a, A. V. Baldycheva^b, V. A. Tolmachev^a, T. S. Perova<sup>b

a</sup> Ioffe Institute, St. Petersburg
^b Department of Electronic and Electrical Engineering, University of Dublin, Trinity College, Dublin 2, Ireland

Abstract: Design and fabrication technology of a microcavity structure based on a double heterojunction in macroporous silicon is suggested. The fabrication process of a strip of a 2D photonic crystal constituted by a finite number of lattice periods and the technique for defect formation by local opening of macropores on the substrate side, followed by filling of these macropores with a nematic liquid crystal, are considered.

Received: 26.01.2011
Accepted: 03.02.2011

 English version: Semiconductors, 2011, 45:8, 1103–1110

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