A. V. Ershov, D. I. Tetelbaum, I. A. Chugrov, A. I. Mashin, A. N. Mikhaylov, A. V. Nezhdanov, A. A. Ershov, I. A. Karabanova, “Annealing-induced evolution of optical properties of the multilayered nanoperiodic SiO$_x$/ZrO$_2$ system containing Si nanoclusters”, Fizika i Tekhnika Poluprovodnikov, 2011, Volume 45, Issue 6,Pages 747

This article is cited in 19 papers

Spectroscopy, interaction with radiation

Annealing-induced evolution of optical properties of the multilayered nanoperiodic SiO$_x$/ZrO$_2$ system containing Si nanoclusters

A. V. Ershov, D. I. Tetelbaum, I. A. Chugrov, A. I. Mashin, A. N. Mikhaylov, A. V. Nezhdanov, A. A. Ershov, I. A. Karabanova

National Research Lobachevsky State University of Nizhny Novgorod

Abstract: The photoluminescence, infrared absorption, and Raman spectra of amorphous multilayered nanoperiodic $a$-SiO$_x$/ZrO$_2$ structures produced by vacuum evaporation and then annealed at different temperatures (500–1100$^\circ$C) are studied. It is established that the evolution of the optical properties with increasing annealing temperature is controlled by sequential transformation of Si clusters formed in the SiO$_x$ layers from nonphase inclusions to amorphous clusters and then to nanocrystals. The finally formed nanocrystals are limited in sizes by the thickness of the initial SiO$_x$ layers and by chemical reactions with ZrO$_2$.

Received: 22.11.2010
Accepted: 29.11.2010