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Fizika i Tekhnika Poluprovodnikov, 2011 Volume 45, Issue 5, Pages 634–638 (Mi phts8534)

This article is cited in 15 papers

Carbon systems

Low-temperature transport properties of multigraphene films grown on the SiC surface by sublimation

A. A. Lebedev, N. V. Agrinskaya, S. P. Lebedev, M. G. Mynbaeva, V. N. Petrov, A. N. Smirnov, A. M. Strel'chuk, A. N. Titkov, D. V. Shamshur

Ioffe Institute, St. Petersburg

Abstract: Multigraphene films grown by sublimation on the surface of a semi-insulating 6H-SiC substrate have been studied. It is shown that pregrowth annealing of the substrate in a quasiclosed growth cell improves the structural quality of a multigraphene film. Ohmic contacts to the film have been fabricated, and the Hall effect has been studied at low temperatures. It is found that a 2D electron gas exists in the films. It is concluded that the conductivity of the film is determined by defects existing within the graphene layer or at the interface between the graphene film and a SiC substrate.

Received: 02.11.2010
Accepted: 08.11.2010


 English version:
Semiconductors, 2011, 45:5, 623–627

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