Amorphous, glassy, organic semiconductors

Electrical, optical, and mechanical properties of amorphous hydrogenated carbon obtained under various deposition conditions

A. A. Babaev^a, S. B. Sultanov^a, M. Sh. Abdulvagabov^b, E. I. Terukov<sup>c

a</sup> Daghestan Institute of Physics after Amirkhanov
^b Daghestan State University, Makhachkala
^c Ioffe Institute, St. Petersburg

Abstract: Activation energy of dc conductivity, refractive index, and microhardness of amorphous hydrogenated carbon films $a$-C:H have been studied. The films are produced from a methane-argon mixture under various deposition conditions on quartz and silicon substrates: $E/p$ = 40–180 V/mPa ($E$ is the electric-field strength in the space between the electrodes, and $p$ is the gas mixture pressure in the chamber) and substrate temperature $T_s$ = 50–300$^\circ$C. In these deposition conditions, diamond-like, polymer-like, and graphite-like $a$-C:H films can be obtained with widely varying activation energy of conductivity, microhardness, and refractive index.

Received: 22.04.2010
Accepted: 07.05.2010

 English version: Semiconductors, 2011, 45:1, 118–120

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