International Conference of Physicists.SPb, October 20-24, 2025, Saint Petersburg

Chemometric analysis of the operation of PdO thin films as a chemical sensor for ozone molecules in the atmosphere

V. V. Chistyakov^a, S. V. Ryabtsev^b, A. A. Al-Habeeb^b, S. M. Soloviev^a, S. Yu. Turishchev<sup>b

a</sup> Ioffe Institute, St. Petersburg
^b Voronezh State University

Abstract: The responses of the measured $S$ and extracted $S_{\mathrm{extr}}$ electrical conductivity of 30 nm thin $p$-type palladium (II) oxide films were studied under cyclic modulation of temperature $T$ in different environments (high-purity argon, air, air+ozone), and the temperature hysteresis of these quantities was investigated. It was found that the temperature dependences of $S_{\mathrm{extr}}$ for different ozone concentrations obey the Jovanovic formula with good accuracy (adj – $R^2 >$ 0.995). For the first time, a conductometric version of temperature-programmed ozone desorption was applied to a semiconductor gas sensor (PdO). Based on the data obtained, an analogue of the Wiegner–Polyani equation was specified in this system, the parameters of which can serve as multivariate calibration variates for selective ozone detection.

Received: 05.05.2025
Revised: 24.06.2025
Accepted: 18.09.2025

DOI: 10.61011/FTP.2025.07.62000.7793