V. E. Borisenko, A. G. Dutov, K. E. Lobanova, S. G. Yudin, “Redistribution of Phosphorus in Implanted Silicon Annealed by a Laser under Subsequent Second Thermal Treatment”, Fizika i Tekhnika Poluprovodnikov, 1987, Volume 21, Issue 8,Pages <nobr>1466

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Fizika i Tekhnika Poluprovodnikov, 1987 Volume 21, Issue 8, Pages 1466–1469 (Mi phts834)

Short Notes

Redistribution of Phosphorus in Implanted Silicon Annealed by a Laser under Subsequent Second Thermal Treatment

V. E. Borisenko, A. G. Dutov, K. E. Lobanova, S. G. Yudin

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