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Fizika i Tekhnika Poluprovodnikov, 2012 Volume 46, Issue 6, Pages 739–750 (Mi phts8253)

This article is cited in 18 papers

Electronic properties of semiconductors

Structural and spectral features of MOCVD Al$_x$Ga$_y$In$_{1-x-y}$As$_z$P$_{1-z}$/GaAs (100) alloys

P. V. Seredina, A. V. Glotova, È. P. Domashevskayaa, A. S. Len'shina, M. S. Smirnova, I. N. Arsent'evb, D. A. Vinokurovb, A. L. Stankevichb, I. S. Tarasovb

a Voronezh State University
b Ioffe Institute, St. Petersburg

Abstract: The study is concerned with MOCVD epitaxial heterostructures grown on the basis of Al$_x$Ga$_y$In$_{1-x-y}$As$_z$P$_{1-z}$ quinary alloys in the region of alloy compositions isoperiodic to GaAs. By the X-ray diffraction technique and atomic force microscopy, it is shown that, on the surface of the heterostructures, there are nanometric objects capable of lining up along a certain direction. From calculations of the crystal lattice parameters with consideration for internal strains, it can be inferred that the new compound is a phase based on the Al$_x$Ga$_y$In$_{1-x-y}$As$_z$P$_{1-z}$ alloy.

Received: 23.11.2011
Accepted: 28.11.2011


 English version:
Semiconductors, 2012, 46:6, 719–729

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