Abstract:
The study is concerned with MOCVD epitaxial heterostructures grown on the basis of Al$_x$Ga$_y$In$_{1-x-y}$As$_z$P$_{1-z}$ quinary alloys in the region of alloy compositions isoperiodic to GaAs. By the X-ray diffraction technique and atomic force microscopy, it is shown that, on the surface of the heterostructures, there are nanometric objects capable of lining up along a certain direction. From calculations of the crystal lattice parameters with consideration for internal strains, it can be inferred that the new compound is a phase based on the Al$_x$Ga$_y$In$_{1-x-y}$As$_z$P$_{1-z}$ alloy.