This article is cited in 7 papers

Non-electronic properties of semiconductors (atomic structure, diffusion)

Determination of the degree of ordering of materials’ structure by calculating the information-correlation characteristics

S. P. Vikhrov, T. G. Avacheva, N. V. Bodyagin, N. V. Grishankina, A. P. Avachev

Ryazan State Radio Engineering University

Abstract: A new method for the analysis of self-organization processes in solid-state materials by calculating the information-correlation characteristics of a surface (in particular, by calculating the average mutual information) is described. Criteria for determining the degree of ordering of a surface structure are suggested; these criteria have been tested for experimental semiconductor structures of single-, poly-crystalline, and amorphous silicon. The dependences of the information characteristics for films of disordered semiconductors on the technological conditions of their fabrication are established.

Received: 22.09.2011
Accepted: 23.09.2011

 English version: Semiconductors, 2012, 46:4, 415–421

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