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Fizika i Tekhnika Poluprovodnikov, 2013 Volume 47, Issue 6, Pages 765–771 (Mi phts7923)

This article is cited in 1 paper

Surface, interfaces, thin films

Effect of the stoichiometric composition of the Si(111)$\sqrt{21}\times\sqrt{21}$-(Au, Ag) surface phase on substrate conductivity

D. A. Tsukanova, M. V. Ryzhkovab, E. A. Borisenkob

a Far Eastern Federal University, Vladivostok
b Institute for Automation and Control Processes, Far Eastern Branch of the Russian Academy of Sciences, Vladivostok

Abstract: The conductivity of a silicon substrate with a Si(111)$\sqrt{21}\times\sqrt{21}$-(Au, Ag) surface phase is studied. It is found that the surface conductivity of such a substrate varies depending on the ratio of the amounts of gold and silver in the given structure. An analysis of the behavior of the Si(111)$\sqrt{21}\times\sqrt{21}$-(Au, Ag) surface conductivity during silver adsorption indicates the effect of a space-charge layer in the surface region of the substrate on the measurement results.

Received: 30.07.2012
Accepted: 13.08.2012


 English version:
Semiconductors, 2013, 47:6, 775–781

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