This article is cited in 6 papers

Manufacturing, processing, testing of materials and structures

Study of postgrowth processing in the fabrication of quantum-cascade lasers

V. V. Mamutin, N. D. Il'inskaya, D. A. Bedarev, R. V. Levin, B. V. Pushnii

Ioffe Institute, St. Petersburg

Abstract: The special postgrowth processing of structures for quantum-cascade lasers is studied. The processing includes regrowth with a high-resistivity material (indium phosphide) with a carrier concentration of $n\approx$ 5 $\cdot$ 10$^{10}$ cm$^{-3}$, photolithography with various wet chemical etchants, and the fabrication of special contacts providing enhanced heat removal. The use of modified postgrowth processing provides necessary parameters satisfying requirements for high-quality devices.

Received: 04.12.2013
Accepted: 23.12.2013

 English version: Semiconductors, 2014, 48:8, 1103–1108

Bibliographic databases:

•