I. P. Smirnova, L. K. Markov, A. S. Pavluchenko, M. V. Kukushkin, S. I. Pavlov, “Optimization of the deposition technique of thin ITO films used as transparent conducting contacts for blue and near-UV LEDs”, Fizika i Tekhnika Poluprovodnikov, 2014, Volume 48, Issue 1,Pages <nobr>61

This article is cited in 8 papers

Semiconductor physics

Optimization of the deposition technique of thin ITO films used as transparent conducting contacts for blue and near-UV LEDs

I. P. Smirnova^ab, L. K. Markov^ab, A. S. Pavluchenko^ab, M. V. Kukushkin^bc, S. I. Pavlov^a

^a Ioffe Institute, St. Petersburg
^b Submicron Heterostructures for Microelectronics Research and Engineering Center, Russian Academy of Sciences, St. Petersburg
^c TETIS Innovation Company ZAO, St. Petersburg, 194156, Russia

Abstract: Structural, optical, and electrical properties of indium-tin oxide (ITO) films produced by electron-beam evaporation, magnetron sputtering, and a combined method are studied. It is demonstrated that, despite the high transparency of the electron-beam-deposited ITO films in the visible spectral range, their conductivity and refractive index are noticeably lower than the respective parameters of ITO films deposited by magnetron sputtering. A technique for the fabrication of double-layer systems by the combination of these two deposition techniques is developed. As a result, we obtained the films, which possess the advantages of magnetron-sputtered layers and can be used as contact layers to $p$-type GaN in LEDs for the blue and nearultraviolet (near-UV) spectral ranges.

Received: 28.05.2013
Accepted: 04.06.2013