XXVII International Symposium "Nanophysics and Nanoelectronics", Nizhny Novgorod, 13 - 16 March 2023

Plasma chemical deposition of hydrogenated DLC films with different hydrogen and $sp^3$-hybrid carbon content

A. I. Okhapkin^a, M. N. Drozdov^a, P. A. Yunin^a, S. A. Kraev^a, D. B. Radishev<sup>b

a</sup> Institute for Physics of Microstructures, Russian Academy of Sciences, 607680 Nizhny Novgorod, Russia
^b A.V. Gaponov-Grekhov Institute of Applied Physics of the Russian Academy of Sciences, 603950 Nizhny Novgorod, Russia

Abstract: The influence of methane plasma parameters on the deposition rate and on the content of the hydrogen and the $sp^3$-carbon fraction in hydrogenated diamond-like carbon films (DLC) was investigated. It was shown that the proportion of the $sp^3$-carbon fraction mainly depends on the inductive power and the argon addition to the plasma; the latter also contributes to a decrease of hydrogen in the films.

Keywords: diamond-like carbon, plasma chemical deposition, $sp^3$-, $sp^3$-hybridization, Raman spectroscopy, secondary-ion mass spectrometry.

Received: 05.05.2023
Revised: 29.06.2023
Accepted: 06.07.2023

DOI: 10.21883/FTP.2023.05.56195.09k

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