Abstract:
The temperature dependence of the carrier removal rate in 4H-SiC upon irradiation with electrons with energy of 0.9 MeV and protons with energy of (15 MeV) is considered. It was found that this dependence is exponential in nature with activation energies of 49–76 meV. It is shown that these values are close to the energies of acoustic phonons in SiC. It has been suggested that acoustic phonons can stimulate the annealing of radiation defects.
Keywords:irradiation with electrons and protons, annihilation of structural defects, acoustic phonons.