Fizika i Tekhnika Poluprovodnikov, 2024 Volume 58, Issue 3,Pages 149–155(Mi phts6732)
Semiconductor physics
Research of design and technological features of manufacturing of low-noise GaAs transistors with T-gate length of 150 nm for information transmission systems
Abstract:
The work presents the results of research of design and technological features of manufacturing of low-noise transistors for information transmission systems. With the software system Synopsys Technology Computer-Aided Design, the optimal parameters of heterostructure layers were determined at mole fraction of indium in the channel equal to 20%, thickness of the barrier layer 18 nm, thickness of the channel layer 12 nm and delta doping concentration 5 $\cdot$ 10$^{12}$ cm$^{-2}$. Research was conducted on the effect of the recess length of the sub-gate region of GaAs transistors on their electrical characteristics. It was found that with the increase of the recess length there is an increase in the gate-to-drain breakdown voltages of the transistor. It is revealed that additional liquid treatment before dielectric deposition decreases the specific drain current density and the transconductance of the volt-ampere characteristic, but allows increasing the gate-drain breakdown voltage of transistors.
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