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Fizika i Tekhnika Poluprovodnikov, 2017 Volume 51, Issue 1, Pages 111–115 (Mi phts6267)

This article is cited in 14 papers

Manufacturing, processing, testing of materials and structures

Nanoscale Cu$_2$O films: Radio-frequency magnetron sputtering and structural and optical studies

D. A. Kudriashova, A. S. Gudovskikhab, A. V. Babichevcde, A. V. Filimonovc, A. M. Mozharova, V. F. Agekyanf, E. V. Borisovf, A. Yu. Serovf, N. G. Filosofovf

a Federal State Budgetary Institution of Higher Education and Science Saint Petersburg National Research Academic University of the Russian Academy of Sciences, St. Petersburg
b Saint Petersburg Electrotechnical University "LETI"
c Connector Optics LLC, St. Petersburg
d St. Petersburg National Research University of Information Technologies, Mechanics and Optics
e Ioffe Institute, St. Petersburg
f Saint Petersburg State University

Abstract: Nanoscale copper (I) oxide layers are formed by magnetron-assisted sputtering onto glassy and silicon substrates in an oxygen-free environment at room temperature, and the structural and optical properties of the layers are studied. It is shown that copper oxide formed on a silicon substrate exhibits a lower degree of disorder than that formed on a glassy substrate, which is supported by the observation of a higher intensity and a smaller half-width of reflections in the diffraction pattern. The highest intensity of reflections in the diffraction pattern is observed for Cu$_2$O films grown on silicon at a magnetron power of 150 W. The absorption and transmittance spectra of these Cu$_2$O films are in agreement with the well-known spectra of bulk crystals. In the Raman spectra of the films, phonons inherent in the crystal lattice of cubic Cu$_2$O crystals are identified.

Received: 10.05.2016
Accepted: 18.05.2016

DOI: 10.21883/FTP.2017.01.44005.8318


 English version:
Semiconductors, 2017, 51:1, 110–114

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