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Fizika i Tekhnika Poluprovodnikov, 2017 Volume 51, Issue 3, Pages 383–385 (Mi phts6214)

Semiconductor physics

Specific features of the capacitance–voltage characteristics of a Cu–SiO$_2$$p$-InSb MIS structure

R. A. Alieva, G. M. Gadjieva, M. M. Gadzhialieva, A. M. Ismailovab, Z. Sh. Pirmagomedova

a Daghestan Institute of Physics after Amirkhanov, Makhachkala, Russia
b Daghestan State University, Makhachkala

Abstract: The capacitance–voltage and conductance–voltage characteristics of InSb-based MIS structures are measured at different probe signal frequencies with the aim of studying the influence exerted by the technological-synthesis conditions on the capacitive properties of these structures. The influence of positive charge built into the insulator on the sample characteristics is discussed. This influence manifests itself as a sharp capacitance “switch” upon changing the polarity of a low-field ($E<$ 10$^6$ V/cm) external signal.

Received: 25.02.2016
Accepted: 25.05.2016

DOI: 10.21883/FTP.2017.03.44212.8220


 English version:
Semiconductors, 2017, 51:3, 367–369

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© Steklov Math. Inst. of RAS, 2026