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Fizika i Tekhnika Poluprovodnikov, 2017 Volume 51, Issue 4, Pages 443–445 (Mi phts6175)

This article is cited in 2 papers

Surface, interfaces, thin films

Reversible electrochemical modification of the surface of a semiconductor by an atomic-force microscope probe

A. S. Kozhukhovab, D. V. Shcheglova, A. V. Latysheva

a Rzhanov Institute of Semiconductor Physics, Siberian Branch of Russian Academy of Sciences, Novosibirsk
b Novosibirsk State University

Abstract: A technique for reversible surface modification with an atomic-force-microscope (AFM) probe is suggested. In this method, no significant mechanical or topographic changes occur upon a local variation in the surface potential of a sample under the AFM probe. The method allows a controlled relative change in the ohmic resistance of a channel in a Hall bridge within the range 20–25%.

Received: 27.10.2015
Accepted: 26.09.2016

DOI: 10.21883/FTP.2017.04.44333.8089


 English version:
Semiconductors, 2017, 51:4, 420–422

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