V. V. Kozlovskii, V. N. Lomasov, “Proton-Stimulated Diffusion of Phosphorus Implanted into Silicon”, Fizika i Tekhnika Poluprovodnikov, 1987, Volume 21, Issue 2,Pages <nobr>360

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Fizika i Tekhnika Poluprovodnikov, 1987 Volume 21, Issue 2, Pages 360–362 (Mi phts591)

Short Notes

Proton-Stimulated Diffusion of Phosphorus Implanted into Silicon

V. V. Kozlovskii, V. N. Lomasov