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Fizika i Tekhnika Poluprovodnikov, 2018 Volume 52, Issue 9, Pages 973–979 (Mi phts5725)

This article is cited in 6 papers

Spectroscopy, interaction with radiation

Optical properties and the mechanism of the formation of V$_{2}$O$_{2}$ and V$_{3}$O$_{2}$ vacancy–oxygen complexes in irradiated silicon crystals

E. A. Tolkachevaa, V. P. Markevichb, L. I. Murina

a Scientific-Practical Materials Research Centre of NAS of Belarus, Minsk, Belarus
b University of Manchester, Manchester, United Kingdom

Abstract: The processes of the formation and annealing of V$_{n}$O$_{m} (n,m\ge2)$ vacancy–oxygen complexes in Czochralski silicon crystals irradiated with fast electrons and reactor neutrons have been studied by infrared absorption Fourier spectroscopy. A number of arguments are presented in favor of identification of absorption bands at 829.3 and 844.2 cm$^{-1}$ as being related to local vibrational modes of V$_{2}$O$_{2}$ and V$_{3}$O$_{2}$ complexes, respectively.

Keywords: Vacancy-oxygen Complexes, Local Vibrational Modes (LVMs), Fast Electrons, Interstitial Oxygen Atoms, DLTS Data.

Received: 20.12.2017
Accepted: 09.01.2018

DOI: 10.21883/FTP.2018.09.46141.8806


 English version:
Semiconductors, 2018, 52:9, 1097–1103

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