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JOURNALS // Fizika i Tekhnika Poluprovodnikov // Archive

Fizika i Tekhnika Poluprovodnikov, 2018 Volume 52, Issue 10, Pages 1207–1212 (Mi phts5717)

This article is cited in 1 paper

Manufacturing, processing, testing of materials and structures

Influence of the synthesis conditions and tin nanoparticles on the structure and properties of $a$-Ñ:Í$\langle$Sn$\rangle$ composite thin films

A. P. Ryaguzov, R. R. Nemkayeva, N. R. Guseinov

National Nanotechnology Laboratory of Open Type (NNLOT), Kazakh National University, Almaty, Kazakhstan

Abstract: The results of studies of the structure and properties of composite materials based on amorphous carbon ($a$-C:H) films and tin nanoparticles are reported. The composite films are synthesized by the magnetron-assisted ion-plasma sputtering of a combined target in a 92%Ar : 4%CH$_4$ : 4%H$_2$ gas mixture. The dependence of the local structure of the $a$-Ñ:Í$\langle$Sn$\rangle$ films on the conditions of synthesis and the content of Sn nanoparticles is clarified by means of Raman spectroscopy. The dependence of the photoluminescence intensity and the optical band gap of $a$-Ñ:Í$\langle$Sn$\rangle$ films on the Sn content is shown.

Keywords: Combined Target, Composite Films, Film Synthesis, Carbon Matrix, SiO$_2$ Substrate.

Received: 05.12.2017
Accepted: 29.01.2018

DOI: 10.21883/FTP.2018.10.46463.8785


 English version:
Semiconductors, 2018, 52:10, 1327–1333

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