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Fizika i Tekhnika Poluprovodnikov, 2020 Volume 54, Issue 3, Pages 266–274 (Mi phts5263)

This article is cited in 3 papers

Semiconductor physics

Kelvin probe force microscopy study of the electrostatic system of the crystal surface of AuNi/GaN Schottky diodes

N. A. Torkhovabc, V. À. Novikovc

a Scientific-Research Institute of Semiconductor Devices, Tomsk
b Tomsk State University of Control Systems and Radioelectronics
c Tomsk State University

Abstract: Using atomic-force-microscopy investigations of the electrostatic system of the crystal surface of AuNi/$n$$n^+$-GaN planar Schottky diodes, it is shown that the electron work function for the surface of metal Schottky contacts depends on their linear size (diameter D). At $D>$ 120 $\mu$m, the work function of the central contact region approaches the work function $e\varphi_{\mathrm{Au}}\approx$ 5.40 eV of a continuous metallic gold film. A decrease in the diameter leads to a decrease in the work function to 5.34 eV at $D$ = 120 $\mu$m, 5.21 eV at $D$ = 40 $\mu$m, 5.18 eV at $D$ = 10 $\mu$m, and 5.14 eV at $D$ = 5 $\mu$m. The observed decrease in the work function with diameter is related to the increasing influence of the built-in periphery electrostatic field $\mathbf{E}_l$, which is determined by the area and perimeter of the Schottky contact. The fundamental differences between the thermodynamic and electrostatic systems of TiAlNiAu/$n^+$-GaN ohmic contacts, in contrast to analogous AuNi/$n$-GaN Schottky systems, are indicative of the absence of a Schottky barrier in them and the decisive role of the thermionic transport of mobile carriers.

Keywords: gallium nitride, Schottky diodes, ohmic contact, periphery electrostatic field, size effect, AFM Kelvin probe technique.

Received: 03.07.2019
Revised: 20.09.2019
Accepted: 21.10.2019

DOI: 10.21883/FTP.2020.03.49031.9203


 English version:
Semiconductors, 2020, 54:3, 337–344

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