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Fizika i Tekhnika Poluprovodnikov, 2020 Volume 54, Issue 10, Pages 1072–1078 (Mi phts5140)

This article is cited in 3 papers

Semiconductor physics

Capacitance spectroscopy of heteroepitaxial AlGaAs/GaAs $p$$i$$n$ structures

M. M. Sobolev, F. Yu. Soldatenkov

Ioffe Institute, St. Petersburg

Abstract: Temperature dependences of capacitance-voltage ($C$$V$) characteristics and deep-level spectra of the graded highvoltage AAl$_{x}$Ga$_{1-x}$As $p^{0}$$i$$n^{0}$ junction grown by liquid-phase epitaxy via autodoping with background impurities were investigated. The changes of the $C$$V$ characteristics at varied measurement temperature and optical illumination demonstrated that the $p^{0}$-, $i$-, $n^{0}$-type layers in the Al$_{x}$Ga$_{1-x}$As under study contain bistable DX centers. In spectra of deep-level transient spectroscopy (DLTS), measured at various bias voltages $V_r$ and filling pulses $V_f$ , a positive DLTS peak is observed for the $n^0$-type layer with thermal activation energy $E_t$ = 280 meV and electron-capture cross-section $\sigma_n$ = 3.17 $\times$ 10$^{-14}$cm$^2$, which is unusual for a majority-carrier trap. This peak is related to the negatively charged state of the Se/Te donor impurity, which is a bistable DX center with negative correlation energy $U$.

Keywords: AlGaAs, capacitance spectroscopy, DX-center, $p^{0}$$i$$n^{0}$ junction, liquid-phase epitaxy.

Received: 27.04.2020
Revised: 30.04.2020
Accepted: 18.05.2020

DOI: 10.21883/FTP.2020.10.49945.9419


 English version:
Semiconductors, 2020, 54:10, 1260–1266

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© Steklov Math. Inst. of RAS, 2026