Low-temperature electric conductivity of silicon ionically implanted by phosphorus and antimony

V. V. Abramov, V. A. Kul'bachinskii, V. G. Kytin, A. B. Timofeev, A. G. Ul'yashin

Lomonosov Moscow State University

Received: 21.10.1991
Accepted: 26.12.1991