P. Zhukowski, “Effect on ion-implantation conditions on defect formation in silicon”, Fizika i Tekhnika Poluprovodnikov, 1992, Volume 26, Issue 1,Pages <nobr>150

JOURNALS // Fizika i Tekhnika Poluprovodnikov // Archive

Fizika i Tekhnika Poluprovodnikov, 1992 Volume 26, Issue 1, Pages 150–158 (Mi phts4566)

Effect on ion-implantation conditions on defect formation in silicon

P. Zhukowski

Received: 15.04.1991
Accepted: 29.08.1991