A. Ya. Vul', T. L. Makarova, V. Yu. Osipov, Yu. S. Zinchik, S. K. Boitsov, “kinetics of silicon oxidation and structure of oxide layers of thickness less than 50 Angströms”, Fizika i Tekhnika Poluprovodnikov, 1992, Volume 26, Issue 1,Pages <nobr>111

kinetics of silicon oxidation and structure of oxide layers of thickness less than 50 Angströms

A. Ya. Vul', T. L. Makarova, V. Yu. Osipov, Yu. S. Zinchik, S. K. Boitsov

Ioffe Institute, St. Petersburg

Received: 06.08.1991
Accepted: 09.08.1991