V. V. Kozlovskii, V. N. Lomasov, G. M. Gur'yanov, A. P. Kovarskiy, “Antimony Diffusion in Silicon Stimulated by Protons”, Fizika i Tekhnika Poluprovodnikov, 1984, Volume 18, Issue 5,Pages <nobr>958

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Fizika i Tekhnika Poluprovodnikov, 1984 Volume 18, Issue 5, Pages 958–960 (Mi phts1776)

Short Notes

Antimony Diffusion in Silicon Stimulated by Protons

V. V. Kozlovskii, V. N. Lomasov, G. M. Gur'yanov, A. P. Kovarskiy

UDC: 621.315.592

Received: 22.07.1983
Accepted: 05.01.1984

Fulltext: PDF file (392 kB)