A. P. Perov, E. I. Rau, V. A. Chubarenko, A. I. Yunovich, “Temperature Dependence of Induced Current and Local Spectroscopy of Impurity Levels by Scanning Electron Microscopy Methods”, Fizika i Tekhnika Poluprovodnikov, 1986, Volume 20, Issue 4,Pages <nobr>607

Temperature Dependence of Induced Current and Local Spectroscopy of Impurity Levels by Scanning Electron Microscopy Methods

A. P. Perov, E. I. Rau, V. A. Chubarenko, A. I. Yunovich

Lomonosov Moscow State University

UDC: 621.315.592

Received: 01.02.1985
Accepted: 07.10.1985