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// Fizika i Tekhnika Poluprovodnikov
// Archive
Fizika i Tekhnika Poluprovodnikov,
1985
Volume 19,
Issue 6,
Pages
1156–1158
(Mi phts1283)
Short Notes
Evaluation of the Profile of Silicon Oxidation-Degree Distribution in Si
$-$
SiO
$_{2}$
Transient Layers
K. S. Daliev
,
A. A. Lebedev
, V. Ekke
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Steklov Math. Inst. of RAS
, 2026