A. A. Lebedev, V. Ekke, “Capacity Spectroscopy of Radiation-Induced Defects Produced in Si$-$SiO$_{2}$ Transient Layer under Cathode Sputterig”, Fizika i Tekhnika Poluprovodnikov, 1985, Volume 19, Issue 5,Pages 831

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Fizika i Tekhnika Poluprovodnikov, 1985 Volume 19, Issue 5, Pages 831–835 (Mi phts1202)

Capacity Spectroscopy of Radiation-Induced Defects Produced in Si$-$SiO$_{2}$ Transient Layer under Cathode Sputterig

A. A. Lebedev, V. Ekke