Effect of Elastic Waves Arising under Ionic Bombardment on Structure Perfection of Semiconductor Crystals

Yu. V. Pavlov, Yu. A. Semin, V. D. Skupov, D. I. Tetelbaum

Lobachevski State University of Nizhni Novgorod

UDC: 621.315.592

Received: 26.07.1985
Accepted: 16.10.1985