PHYSICS

Sources of low-energy charged particle beams

V. A. Gruzdev, V. G. Zalesski, P. N. Soldatenko

Polotsk State University, Novopolotsk, Belarus

Abstract: Some results obtained in the development of low-energy IEP forming electron and ion beams with parameters sufficient for a number of surface modification technologies are presented.

Keywords: low-energy beams, electron source, electrode structure.

UDC: 537.533; 621.384

Received: 15.09.2014