International Conference Physics.SPb/2023 October 23-27, 2023, St. Petersburg
Applied optics

Simulation and measurement of stroke in piezoceramic combs with a decrease in cross-sectional area of control elements

V. V. Toporovsky^a, V. V. Samarkin^a, A. V. Kudryashov^a, I. V. Galaktionov^a, A. A. Panich^b, A. Yu. Malykhin<sup>b

a</sup> Institute of Dynamics of Geospheres, Russian Academy of Sciences, Moscow, Russia
^b Southern Federal University, Institute of High Technology and Piezo Technology, Rostov-on-Don, Russia

Abstract: Numerical modeling of multilayer piezoactuators with a cross-sectional area of 2 $\times$ 2 mm was carried out. It was shown that when interdigitated switching is used in piezoactuators, a local redistribution of transverse strain maxima is observed, which leads to a decrease in the mechanical strength and reliability of control elements. Piezoceramic combs with identical linear dimensions were produced and the mechanical and electrical properties of the developed elements were measured. It was revealed that stroke at a control voltage of 300 V decreases from 4 to 1.5 $\mu$m when using the interdigitated switching method in comparison with multilayer actuators of larger cross-section due to a decrease in the effective polarization area of piezoactuators. Piezoceramic combs with wire commutation were manufactured, where the displacement at a control voltage of 300 V was 4.6–4.8 $\mu$m.

Keywords: wavefront correctors, multilayer piezoactuators, finite element method, adaptive optics.

Received: 12.05.2023
Revised: 16.10.2023
Accepted: 30.10.2023

DOI: 10.61011/OS.2023.11.57021.5092-23

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