Optical materials

Optical and photoluminescent properties in the ultraviolet and visible spectral range of ZnO thin films created using corpuscular-photonic technology

L. V. Grigor'ev^ab, A. A. Semenov<sup>b

a</sup> Saint Petersburg State University, St. Petersburg, Russia
^b Saint Petersburg Electrotechnical University "LETI", St. Petersburg, Russia

Abstract: The investigated structural, optical and photoluminescent properties of ZnO thin films produced by various corpuscular-photonic technologies, such as reactive ion-plasma sputtering, pulsed electron beam evaporation and laser ablation. The results of X-ray structural analysis of zinc oxide films synthesized on KU-1 quartz substrates are presented. Transmission spectra, reflectance spectra, absorption spectra and spectral dependence of photoluminescence of ZnO thin films in the ultraviolet and visible ranges of the spectrum are presented.

Keywords: zinc oxide, diffraction pattern, reactive ion-plasma sputtering, pulsed electron beam sputtering, laser ablation, transmission spectrum, reflectance spectrum, photoluminescence spectrum.

Received: 10.09.2024
Revised: 10.09.2024
Accepted: 27.10.2024

DOI: 10.61011/OS.2024.10.59421.7064-24

Bibliographic databases:

•