SEMICON Russia 2014

Multifunctional thermal sensors

Yu. D. Akulshin, A. V. Gluhovskoi, A. N. Kazakin, I. M. Komarevtcev, M. S. Lurie, E. N. Piatyshev

St. Petersburg Polytechnic University

Abstract: The give paper presents the results of NMST Lab in designing and researching thermal MEMS sensors for different purposes. The sensors are based on the MEMS-core converter and micromachining technologies.

Keywords: technology, sensors, mems.

UDC: 681.586.6