SEMICON Russia 2014

Lba differential pressure sensors high immunity to dust contamination

T. T. Thieme

Silicon Saxony e.V.

Abstract: In this paper First Sensors LBA differential pressure (DP) sensors are experimentally compared to other sensors which use the same (thermal-anemometer-based, non-membrane) sensing principle, where differential pressure is inferred from a gas flow through the sensor.

Keywords: lba, first sensors, lba, diferential presure sensors, first sensors, gas flow through.

Language: English