MEMS Technologies: Theory and Practice

Capacitive MEMS microphones for medical applications

V. V. Loboda, U. V. Salamatova

Peter the Great St. Petersburg Polytechnic University

Abstract: Microphones manufactured based on MEMS technology have been significantly applied in medicine. However, medical application requires more sensitive and low-frequency MEMS microphones. To achieve this goal capacitive microphones are the most appropriate as they have a low level of noise and high sensitivity compared to piezoelectric and piezoresistive microphones. The structure and materials enable to change electric parameters of microphones for better. To increase sensitivity it is possible to find a membrane structure when internal mechanical resistivity is minimal. When MEMS structures are ideally found, a frequencies range can be expanded. Membrane flexibility can be expanded by means of applying meshes at the edges, corrugations and springs.

Keywords: MEMS, capacitive microphone, low frequency microphone, sensitivity, membrans.

UDC: 621.3.049.7

Received: 15.06.2021

Language: English

DOI: 10.18721/JCSTCS.14205