Nonlinear physics and mechanics

MEMS Sensor of Force

R. Hart'anský^a, J. Hricko^b, M. Mierka^a, J. Halgoš^a, M. Dzuriš<sup>a

a</sup> Institute of Electrical Engineering, Faculty of Electrical Engineering and Information Technology, Slovak University of Technology, Bratislava, Slovakia
^b Institute of Informatics, Slovak Academy of Sciences Banska Bystrica, Slovakia

Abstract: The paper is focused on the design of a compact compliant mechanical body (CCMB) that will be used as a transducer of the one-axis force to the distance of two plates. The conversion principle of the distance (which carries information about the acting force) to the frequency of the electrical signal is carefully described in the article too.

Keywords: compact compliant mechanical body, mechanical force sensor, transfer response.

MSC: 93B18, 93B52

Received: 31.05.2019
Accepted: 01.10.2019

Language: English

DOI: 10.20537/nd200107

Bibliographic databases:

•