This article is cited in 1 paper

Linear measurements in scanning electron microscopy based on morphological analysis of the images

E. A. Grachev, D. M. Ustinin, A. I. Chulichkov

M. V. Lomonosov Moscow State University, Faculty of Physics

Abstract: Problems of finding particular object on SEM video signal and measurement of its size have great importance in electron microscopy. New approach is proposed to solution of this problems based on morphological analysis of images. Method is successfully used in electron beam lithography and microscopy.

Received: 22.11.2001

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