Mathematical models and computer experiment

About mathematical modelling of multidimensional ion implantation problems

I. E. Mozolevski

Belarusian State University

Abstract: Some aspects of simulation of interaction of fluxes of acseleratedi ons with solids in multidimensional problems of ion implantation are considered. Mathematical model and computational algorithm for its realisation are proposed. The numerical simulation results are presented and comparison with experimental data and Monte-Carlo simulation results is effectuated.

Received: 27.09.1994

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