This article is cited in 1 paper

Computational methods and algorithms

Analysis of light scattering by hole in a film by discrete sources method

N. V. Grishina, Yu. A. Eremin

M. V. Lomonosov Moscow State University

Abstract: The paper is devoted to analysis of the light scattering by the hole in a film deposited on silicon substrate. To realize numerical modelling it is suggested to employ Discrete Sources Method. The constructing of the approximate solution is examined. Computer simulating results are discussed.

Received: 03.11.1997