Thermodynamic characteristics of the laser evaporation of amorphous carbon nitride

S. I. Kudryashov, O. V. Kravchenko, N. B. Zorov, Yu. Ya. Kuzyakov

Department of Chemistry, M.V. Lomonosov Moscow State University, Moscow, Russian Federation

Abstract: A study of the thermodynamics of laser evaporation of amorphous carbon nitride makes it possible to predict the optimum conditions for the laser deposition of crystalline films of superhard carbon nitride.

Language: English

DOI: 10.1070/MC1998v008n02ABEH000899

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