This article is cited in 6 papers

Kinetic regularities of solid-phase formation in the branching chain reaction of dichlorosilane oxidation in rf plasma at low pressures and 293 K

N. M. Rubtsov, G. I. Tsvetkov, V. I. Chernysh

A.G. Merzhanov Institute of Structural Macrokinetics and Materials Science, Russian Academy of Sciences, Chernogolovka, Moscow Region, Russian Federation

Abstract: In studies of the initiated ignition of dichlorosilane−oxygen mixtures it has been shown that rf discharge applied before ignition leads to an increase in the lifetime of aerosol particles in the reactor volume, in contrast to direct current discharge which markedly decreases the amount of aerosol particles formed in ignition. Ordered structures of the type of ‘liquid dust crystal’ have been detected in rf plasma of branching-chain heterophaseous reaction.

Language: English

DOI: 10.1070/MC2006v016n01ABEH002176

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