Abstract:
A dc magnetron discharge in neon is studied at different polarities of the electrode system. It is found that the electron energy distribution function is composed of three groups of electrons: fast electrons accelerated by the strong field of a cathode sheath, slow electrons confined in a potential well due to the space-charge field, and intermediate-energy electrons. It is shown that the energy distribution of the confined electrons is a Maxwell–Boltzmann distribution function, whereas the energy distribution of the intermediate electrons is typical of electron diffusion at a constant total energy. The measured values of the cathode sheath thickness depend on the source polarity.
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